Profile measurement system was from Taylor Hobson Co. that is a world leader in precision measurement system. It can measure roughness, profile, angle, radii and etc. It has the following characters:
- The ratio of sensorís measurement area and distinguishability is 65536:1;
- The linearity accuracy of drive box is 0.5um/120mm, 0.2um/20mm;
- Measurement accuracy: roughness: 2%+/-4mm; radii: during 0.1-12.5mm, the accuracy is 1%~0.02%, during 12.5~20mm, the accuracy is 0.02%, during 25~1000mm, the accuracy is 0.02%~0.1%; angle: accuracy is 0.5í; profile: accuracy for line is 0.5um/120, 0.25um/60mm, 0.2um/20mm, accuracy for arc is 0.2um/9.5mm.